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Stroboscopic scanning white light interferometry at 2.7 MHz with 1.6 µm coherence length using a non-phosphor LED source

Abstract: 

Stroboscopic scanning white light interferometry (SSWLI) allows precise three dimensional (3D) measurements of oscillating samples. Commercial SSWLI devices feature limited pulsing frequency. To address this issue we built a 400-620 nm wideband 150 mW light source whose 1.6 µm wide interferogram is without side peaks. The source combines a non-phosphor white LED with a cyan LED. We measured a calibration artifact with 10 nm precision and obtained 40 nm precision when measuring the 3D profile of a capacitive micromachined ultrasonic transducer membrane operating at 2.72 MHz. This source is compatible with solid state technology.

Authors: Ville Heikkinen,  Ivan Kassamakov, Tor Paulin, Anton Nolvi,, Edward Haeggström

Posted in Nanoscope, Stroboscopic interferometry

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